課程資訊
課程名稱
 高科技廠房設施設計
HIGH-TECH FACILITY DESIGN 
開課學期
 99-1 
授課對象
 工學院  土木工程學系  
授課教師
 張陸滿 
課號
 CIE5065 
課程識別碼
 521 U3790 
班次
  
學分
 3 
全/半年
 半年 
必/選修
 選修 
上課時間
 星期二A,B,C(18:25~21:05) 
上課地點
 土研402 
備註
 上課時間:18:30-21:30
限學士班三年級以上
總人數上限：60人 
Ceiba 課程網頁
 http://ceiba.ntu.edu.tw/991521_U3790 
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課程概述

The purpose of this course is to provide basic design knowledge needed for cleanroom facilities that supplement high-tech manufacturing and R&D. High-Tech includes, not limited to, the advanced technologies applied in the fields of microelectronics, optoelectronics, precision equipment, telecommunication, nanotech, pharmaceutics, biotech, medical devices, animal experiment, and Aerospace. The processes undertaken in high-tech manufacturing plants and R&D labs require cleanrooms with extremely stringent environmental control.

The environmental control includes temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel heath, safety and security and prevention of biohazard.

The focus of this course is on designing cleanroom and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra pure clean room and ultra pure utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing plant and research lab.

The environmental control includes temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel heath, safety and security and prevention of biohazard.

The focus of this course is on designing cleanroom and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra pure clean room and ultra pure utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing plant and research lab.

Outstanding full-time students will be recommended to receive summer intermship from high-tech companies and get exposured to high-tech facility design and/or construction in summer.


 

課程目標
 1.Differentiate the typical processes in semiconductor, biotech,
devices, and pharmaceutical manufacturing and R&D.

2.Explain the interdisciplinary nature of high tech manufacturing and research.

3.Perform architectural design for cleanroom and schematically layout factory.

4.Use the basic theories and principles to design systems for heating, ventilation and air conditioning (HVAC,) water/air treatment, noise and vibration mitigation.

5.Classify cleanrooms in terms of various international standards.

6.Specify the environmental control criteria for cleanroom in terms of temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials outgassing, and safe grounding.

7.Apply the knowledge in testing and commissioning cleanroom and its associated facilities.

8.Establish contamination control programs for constructing, operating, and maintaining the high-tech facilities.

9.Address the issues in automatically managing the emergency, safety, and security systems.

10.Link to the information sources for further studies in nano/micro fabrication and research.
 
課程要求
 This course is intended to offer for EMBA, MS, & PhD Graduates, and undergraduate Juniors and Seniors. Students in engineering, science, pharmacy, and life sciense will be exposed to fundamental theories and their applications in the design/build/certify of the high tech manufacturing plants and research labs. Academic faculty will teach basic theories and principles. Professional industrial experts will be invited to cover the application of theories and principles in the real world practices. The contents will include lectures, home works, a semester team project with an oral presentation and a written report, and a final examination. Field trips to visit high-tech plants and research labs, and cleanrooms will be arranged. Moreover, laboratory experiments will be provided to enable students to have hands-on experiences in the environmental impact on high-tech manufacturing and research.

There will be approximate 8 homeworks in Fall 2010. Homework counts 15% of “Total Grade.” Students will have reading assignments. The homework is to answer the questions derived from the reading assignments, lectures, lab experiments, cleanroom tour, or field trips.

Meanwhile, each stdudent will be required to write a maximum 15-page report in either Chinese or English (Double Space.) The page limitation imposes an organizational and summarization burden on student. Student must be concise and turn in timely. Figures, tables and graphs often help present useful concepts in less space. You should start selecting your high-tech related topic right after semester start. To avoid overlapping, the topic must obtain Professor Chang's approval.



There is one (1) group term project. The group term project tests the student understands of the principal concepts covered in the course within the context of a comprehensive “real-world” problem. It also provides an opportunity to develop skills for working in a project team context and communication skills. The term project counts 50% of the final grade. Off-campus students are encouraged to form a virtual group working on job-related topics through internet and/or other means.

A Final Exam is required in the final exam week of Junuary 9-15. The Final Exam will be comprehensive and counted as 15% of “Total Grade.” Another 10% is for class participation.

The course outline may be adjusted to suit for students' interests and learning progress.
2. Other guest instructors may be invited to reinforce students understanding of applying theories into real world practice.
3. The course will be taught in Mandarin. Most hand-outs, homework arrangements and final exam will be in English.
4. Students are welcome to use English in the class and answer the homework, and final Exam.
5. To get 10% grade for class participation, students have to take Lab Tour & Field Trips on the plant sites.

Expect to be assigned homework problems frequently. Homework is due at the beginning of the next class session. No homework assignment can be missed without penalty, without an acceptable prior excuse. Homework counts 20% of ‘FINAL’ grade. In order to receive course credit and full grade, a student must:
.
Satisfactorily complete ALL assignments.

Two unexcused absences will result in a grade of 'Incomplete' or 'Flunk', depending on whether or not the student is considered to be passing in all other aspects at the time of the third absence. Failure to complete ALL assignments will result in a grade of 'I' or 'F', depending on whether or not the student is considered to be passing in all other aspects.

Except in emergency situation, a student must attend all the field trip. Unexcused absences will result in a final grade of 'Incomplete.'



 
預期每週課後學習時數
  
Office Hours
 另約時間 備註： Appointment by e-mail at luhchang@ntu.edu.tw or or by phone call at (02)-3366-4269 
指定閱讀
 Whyte, W., Cleanroom Design, John Wiley, 2nd ed., New York 1999

2. Carlberg, David M., Cleanroom Microbiology, 2nd ed. CRC Press, Boca Raton, Florida, 2004

Both textbooks can be accessed and downloaded from NTU Library online system.
 
參考書目
 1. Chang, C.Y., and Sze, S.M., ULSI Technology, McGraw-Hill Company, Inc., International Edition, 1996, New York.
2. Food and Drug Administration, Guideline on Sterile Drug Products Produced by Aseptic Processing, FDA, Information Branch, Rockville, Maryland, USA.
3. International Organization for Standards, ISO Standard 14644-4, part 4: Design, Construction, Start up, Geneva, Switzerland, 1999.
4. International Society of Pharmaceutical Engineering, Pharmaceutical Engineering Guide – A Guide for New Facilities, Volume 3: Sterile Manufacturing Facilities, ISPE, 2000.
5. Lurgi, S., Xu, J., and Zaslavsky, A., Future Trends in Microelectronics, Wiley, N.Y, 1999.
6. Mulhall, D., Our Molecular Future: How Nanotechnology, Robotics, Genetics, and Artificial Intelligence Will Transform Our World, Prometheus Books, Amherst, N.Y., 2002.
7. Nishi, Y., Doering, K., and Wooldridge, T., Handbook of Semiconductor Manufacturing Technology, Marcel Dekker, New York, 2000.
8. Scherge, M., Biological Micro- and Nanotribiology: Nature’s Solutions, Sprinker, New York, 2001.
9. Van Zant, Peter, Microchip Fabrication: A Practical Guide to Semiconductor Processing, 4th ed., McGraw-Hill, New York, 2000.
10. Whyte. W., Cleanroom Technology: Fundamentals of Design, Testing, and Operation Operation, Chichester, New York, 2001.
11. 半導體製造技術，Quirk Serda 著，羅文雄、蔡榮輝 譯 ，滄海（2003）
12. 半導體奈米技術，龍文安 著，五南(2006)
13. 半導體英語，傳田精一 著，陳連春 譯，建興(2003)
14. 高科技廠務，顏登通，全華科技(2008)
 
評量方式
(僅供參考)
    
課程進度
週次
日期
單元主題
第1週
 9/14  Course Introduction
Integrated Circuit Manufacturing Processes
 
第2週
 9/21  Nanotechnology Bases and Manufacturing 
第3週
 9/28  Cleanroom Milestones, Contamination Control, and Construction Protocols 
第4週
 10/05  Fab Design, Manufacturing Tool-Up, and Piping Contamination Control 
第5週
 10/12  Pharmaceutical, Medical Devices, and
Biotech Manufacturing and Cleanroom
 
第6週
 10/19  High-Tech Fab/Plant Layout 
第7週
 10/26  Fundamentals of Vibration, Sound & Mitigation  
第8週
 11/02  Ground Vibration & Microvibration on Semiconductor Fab and Its Mitigation 
第9週
 11/09  No Mid-term Exam, Field Trips Industrial Park and High-Tech Fab/Plant and Environmental & Ecological Park in Tainan on 11/13 afternoon and 11/14.  
第10週
 11/16  Electro-Magnetic Compatibility  
第11週
 11/23  HVAC Design 
第12週
 11/30  Electrical Systems and Power Stability in High-Tech Facilities
 
第13週
 12/07  Ultra Pure Utility & Piping System and Airborne Molecular Contamination, and  
第14週
 12/14  Pharmaceutical, Medical Devices, and
Biotech Manufacturing and GMP
 
第15週
 12/21  No class on 12/21. Field Trip on 12/20 to Fab/Plant of Solar Energy, LED, Photon Source, or TFT and learn their Manufacturing Processes 
第16週
 12/28  Fab Tour, Project Scheduling and Control & Cleanroom Cimmissioning. A whole day tour will be held on a weekend. Student must attend except in emergency.  
第17週
 1/04  Term Project Presentation